The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 04, 2025

Filed:

Jan. 16, 2024
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Alexander Henstra, Eindhoven, NL;

Yuchen Deng, Eindhoven, NL;

Holger Kohr, Eindhoven, NL;

Assignee:

FEI Company, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/20 (2018.01); G01N 23/207 (2018.01); G01N 33/00 (2006.01); G03H 5/00 (2006.01); H01J 37/04 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
G01N 23/207 (2013.01); G01N 33/39 (2024.05); G03H 5/00 (2013.01); H01J 37/04 (2013.01); H01J 37/26 (2013.01); G01N 2223/0566 (2013.01); G01N 2223/064 (2013.01); G03H 2224/04 (2013.01); H01J 2237/2614 (2013.01);
Abstract

Methods for using a single electron microscope system for investigating a sample with twin electron beams having different focal lengths include the steps of emitting electrons toward the sample, forming the electrons into a two beams, and then modifying the focal properties of at least one of the two beams such that they have different focal planes. Once the two beams have different focal planes, the first electron beam is focused at the sample, and the second electron beam is focused so that it acts as a TEM beam that is parallel beam when incident on the sample. Emissions resultant from the first electron beam and the TEM beam being incident on the sample can then be detected by a single detector or detector array and used to generate a TEM image.


Find Patent Forward Citations

Loading…