The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 04, 2025

Filed:

Sep. 21, 2022
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Joshua Stacey, Chandler, AZ (US);

Yosef Kornbluth, Phoenix, AZ (US);

Whitney Bryks, Tempe, AZ (US);

Assignee:

INTEL CORPORATION, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 41/00 (2006.01); B32B 37/06 (2006.01); B32B 37/08 (2006.01); B32B 37/10 (2006.01); H01L 21/48 (2006.01);
U.S. Cl.
CPC ...
B32B 41/00 (2013.01); B32B 37/06 (2013.01); B32B 37/08 (2013.01); B32B 37/10 (2013.01); H01L 21/4846 (2013.01); B32B 2309/022 (2013.01); B32B 2309/105 (2013.01); B32B 2309/12 (2013.01); B32B 2309/72 (2013.01); B32B 2457/00 (2013.01);
Abstract

The present disclosure is directed to a position-controlled lamination tool or press that includes an array or plurality of pressure sensors and an array or plurality of heating/cooling elements or components, which may be coupled together, for preventing or reducing laminating film or material bleed out and improving thickness variation performance. The pressure sensors may provide a controller, which is coupled to the lamination tool, with real-time feedback on any thickness variations across a substrate panel and the controller may adjust the temperature output of the heating and cooling elements to locally modify the viscosity of the laminating material in one or more regions of the substrate panel to either decrease or increase the flowability of the laminating material.


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