The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2025
Filed:
Oct. 13, 2022
Disco Corporation, Tokyo, JP;
Hayato Iga, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A peel-off layer is finally formed in an area, i.e., a first inner area or a second inner area, in a workpiece that is closer to the center of the workpiece among a plurality of areas. The workpiece has a cylindrical shape, so that the second inner area is wider than the other areas, e.g., the second outer area, in which the peel-off layers are formed. Consequently, when the peel-off layer is finally formed in the second inner area, the internal stresses in the workpiece are dispersed in a wider range than when the peel-off layer is finally formed in the second outer area. Thus, large cracks thicknesswise of the workpiece are prevented from being developed from modified regions contained in the peel-off layer. Therefore, the amount of workpiece material to be disposed of in subsequent steps is reduced, resulting in increased manufacturing productivity.