The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2025
Filed:
Oct. 18, 2022
Applicant:
Carl Zeiss X-ray Microscopy, Inc., Dublin, CA (US);
Inventor:
Claus Flachenecker, Hayward, CA (US);
Assignee:
Carl Zeiss X-ray Microscopy, Inc., Dublin, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05G 1/52 (2006.01);
U.S. Cl.
CPC ...
H05G 1/52 (2013.01);
Abstract
A method for controlling an x-ray source comprises generating an electron beam for striking the target to generate x-rays and steering the electron beam to a desired location on the target using a first and a second steering system distributed along a flight tube. In this way, the beam can be steering to the desired location while also passing through the center of a focusing lens to maintain optimal beam characteristics. Also possible is scanning the electron beam over the target to find a fiducial mark. Then, a desired location can be found as an offset from this mark.