The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 28, 2025

Filed:

Jan. 25, 2022
Applicant:

Korea Institute of Science and Technology, Seoul, KR;

Inventors:

Hyung-jun Kim, Seoul, KR;

Seung Hwan Kim, Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/02 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1037 (2013.01); H01L 21/02532 (2013.01); H01L 21/02538 (2013.01); H01L 21/02551 (2013.01); H01L 21/02645 (2013.01);
Abstract

Embodiments relate to a semiconductor device, which includes: a substrate made of a first material; an insulating layer formed on an upper surface of the substrate; a trench formed at the insulating layer to penetrate the insulating layer toward the substrate; and a seed layer disposed in the trench. The seed layer is made of a second material, the second material lattice-mismatches with respect to the first material, the seed layer includes a threading dislocation extending at least partially in a first direction non-parallel to the upper surface of the substrate and parallel to a <110> direction of a (111) plane and a threading dislocation extending at least partially in a second direction, and the extension of the threading dislocation is terminated at a sidewall of the trench.


Find Patent Forward Citations

Quick Actions:

Kim, Hyung-jun. (2025). Semiconductor device having trench structure in which propagation of threading dislocations to upper layer of three-dimensional stacked structure is suppressed (U.S. Patent No. 12211899). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12211899

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…