The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 28, 2025

Filed:

Apr. 07, 2022
Applicant:

Globalwafers Co., Ltd., Hsinchu, TW;

Inventors:

TaeHyeong Kim, PyeongTeak, KR;

JaeKoo Kang, Asan, KR;

Soon Sung Park, Cheonan, KR;

Assignee:

GlobalWafers Co., Ltd., Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B25J 9/16 (2006.01); B25J 19/02 (2006.01); G06V 10/25 (2022.01); G06V 10/50 (2022.01); G06V 10/75 (2022.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67259 (2013.01); B25J 9/1697 (2013.01); B25J 19/025 (2013.01); G06V 10/25 (2022.01); G06V 10/507 (2022.01); G06V 10/751 (2022.01); H01L 21/681 (2013.01);
Abstract

A system for monitoring alignment of a second component relative to a first component includes a camera, and a controller including a processor and a nontransitory memory. The controller is configured to receive a first captured image from the camera when the second component is in a predetermined position relative to the first component, receive a selection of a region of interest (ROI) in the first captured image, identify a visible feature of the second component within the ROI of the first captured image, receive captured images from the camera during a subsequent operation, identify a second captured image when the second component is expected to be in the predetermined position relative to the first component, and determine if the second component is in the predetermined position relative to the first component based on the second captured image and the identified visible feature of the first captured image.


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