The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2025
Filed:
Apr. 30, 2019
Applicant:
Evatec Ag, Trübbach, CH;
Inventors:
Assignee:
EVATEC AG, Trübbach, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B65G 47/90 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67201 (2013.01); B65G 47/90 (2013.01); H01L 21/67167 (2013.01);
Abstract
A vacuum treatment apparatus for substrate including a vacuum treatment arrangement. An input load-lock arrangement leads towards and into the vacuum treatment arrangement and an output load-lock arrangement leads from the vacuum treatment arrangement. One of the two load-lock arrangements includes at least two load-locks in series respectively pumped by pumps.