The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 28, 2025

Filed:

Dec. 22, 2021
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Oleksii Kaplenko, Brno, CZ;

Tomáš Vystavěl, Brno, CZ;

Petr Wandrol, Brno, CZ;

Ondřej Machek, Brno, CZ;

Assignee:

FEI Company, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); G06N 3/045 (2023.01); G06T 7/00 (2017.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G06N 3/045 (2023.01); G06T 7/97 (2017.01); H01J 37/244 (2013.01); G06T 2207/10056 (2013.01); G06T 2207/20084 (2013.01);
Abstract

Apparatuses and processes for generating data for three-dimensional reconstruction are disclosed herein. An example method at least includes exposing a subsequent surface of a sample, acquiring an image of the subsequent surface, comparing the image of the subsequent surface to an image of a reference surface, based on the comparison exceeding a threshold, acquiring a compositional or crystalline map of the subsequent surface, and based on the comparison not exceeding the threshold, exposing a next surface.


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