The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2025
Filed:
Nov. 23, 2021
Hitachi High-tech Corporation, Tokyo, JP;
Kosuke Matsumoto, Tokyo, JP;
Satoshi Takada, Tokyo, JP;
Hideki Nakayama, Tokyo, JP;
Miyuki Fukuda, Tokyo, JP;
Kozo Miyake, Tokyo, JP;
Yuya Isomae, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
As a technology for an observation device and an inspection device, a technology capable of reducing a work effort related to generation of a recipe including alignment information is provided. An observation deviceincludes an observation unitthat obtains an image for observing a sampleon a stage. A computer systemof the observation deviceacquires the image from the observation unit, specifies a period of a pattern-formed unit region repeatedly formed on a surface of the samplefrom the image, and generates a recipe including observation or inspection alignment positions of the sampleusing the specified period.