The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2025
Filed:
Jul. 21, 2021
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Ramesh Chandrasekharan, Lake Oswego, OR (US);
Easwar Srinivasan, Portland, OR (US);
Erica Sakura Strandberg Pohl, Golden, CO (US);
Andrew Borth, Newberg, OR (US);
Aleksey V. Altecor, Newberg, OR (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01); C23C 16/26 (2006.01); C23C 16/455 (2006.01); C23C 16/50 (2006.01); C23C 16/52 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4482 (2013.01); C23C 16/26 (2013.01); C23C 16/45561 (2013.01); C23C 16/50 (2013.01); C23C 16/52 (2013.01); H01L 21/67017 (2013.01);
Abstract
The present disclosure relates, in part, to an apparatus for controlling the concentration of a component within a gas mixture. In particular embodiments, the component is a vaporized liquid component, such as a vaporized stabilizer or a vaporized precursor. Also described are systems thereof and methods for such control.