The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2025
Filed:
May. 26, 2023
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Sun Mi Kim, Jeollanam-do, KR;
Jisu Hong, Chungcheongnam-do, KR;
Moonsik Choi, Seoul, KR;
Oh Jin Kwon, Chungcheongnam-do, KR;
Assignee:
SEMES CO., LTD., Cheonan-si, KR;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6715 (2013.01); H01L 21/0273 (2013.01); H01L 21/67051 (2013.01);
Abstract
The inventive concept provides an apparatus and method for removing a film formed on a substrate. A method for treating the substrate includes a primary solvent dispensing step of dispensing an organic solvent onto the substrate to remove a photoresist film on the substrate and an ozone dispensing step of dispensing a liquid containing ozone onto the substrate to remove organic residue on the substrate, after the primary solvent dispensing step.