The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2025
Filed:
Oct. 10, 2021
Freiberger Compound Materials Gmbh, Freiberg, DE;
Wolfram Fliegel, Dresden, DE;
Christoph Klement, Chemnitz, DE;
Christa Willnauer, Dorfhain, DE;
Max Scheffer-Czygan, Chemnitz, DE;
André Kleinwechter, Freiberg, DE;
Stefan Eichler, Dresden, DE;
Berndt Weinert, Freiberg, DE;
Michael Mäder, Coswig, DE;
FREIBERGER COMPOUND MATERIALS GMBH, Freiberg, DE;
Abstract
A gallium arsenide substrate which exhibits at least one surface having a surface oxide layer comprising gallium and arsenic oxides and which exhibits at least one surface having, according to an ellipsometric lateral substrate mapping with an optical surface analyzer, based on a substrate diameter of 150 mm as reference, a defect number of <6000 and/or a total defect area of less than 2 cm, wherein a defect is defined as a continuous area of greater than 1000 μmhaving a deviation from the average measurement signal in elipsometric lateral substrate mapping with an optical surface analyzer of at least ±0.05%.