The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2025
Filed:
Dec. 04, 2019
Shanghai Ic R&d Center Co., Ltd., Shanghai, CN;
Xiaoxu Kang, Shanghai, CN;
SHANGHAI IC R&D CENTER CO., LTD., Shanghai, CN;
Abstract
The present invention disclosures a recessed structure capable of being conveniently monitored online, wherein comprising a dielectric layer I, and a dielectric layer II positioned above the dielectric layer I, the dielectric layer I comprises a metal via layer and a metal contact layer, the metal contact layer is positioned above the metal via layer; the dielectric layer II comprises an inverted trapezoid groove positioned above the metal contact layer, the inverted trapezoid groove has inclined sidewall, and the horizontal cross-sectional area of the inverted trapezoid groove far away from the metal contact layer is larger than the horizontal cross-sectional area of the inverted trapezoid groove close to the metal contact layer; the inclined sidewall is covered with a reflective film. The present invention provided the recessed structure capable of being conveniently monitored online and a preparation method thereof, by an alternating bright and dark annular image formed by a monitoring system, it can quickly identify defects in the recessed structure.