Integrated circuit devices including a power distribution network and methods of forming the same

Abstract

Integrated circuit devices and methods of forming the same are provided. The integrated circuit devices may include a static random access memory (SRAM) unit. The SRAM unit may include a first inverter on a substrate and a power distribution network (PDN) structure including a first power rail and a second power rail. The substrate may extend between the first inverter and the PDN structure. The first inverter may include a first upper transistor including a first upper source/drain region, a first lower transistor between the substrate and the first upper transistor and including a first lower source/drain region, a first power contact extending through the substrate and electrically connecting the first upper source/drain region to the first power rail, and a second power contact extending through the substrate and electrically connecting the first lower source/drain region to the second power rail.