The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Jun. 01, 2021
Tokyo Electron Limited, Tokyo, JP;
Kippei Sugita, Miyagi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An execution device according to exemplary embodiments includes an operation device, a first acceleration sensor, a second acceleration sensor, and a control device. The operation device executes a predetermined operation. The first acceleration sensor detects acceleration in a first direction along a horizontal direction. The second acceleration sensor detects acceleration in a second direction intersecting the first direction along the horizontal direction. The control device recognizes a transport position of the execution device in the semiconductor manufacturing apparatus based on output values from the first acceleration sensor and the second acceleration sensor. When it is recognized that the execution device is transported to a predetermined position, the control device causes the operation device to execute the predetermined operation.