The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Dec. 10, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Joseph Frederick Sommers, Roseville, CA (US);
Joseph Frederick Behnke, San Jose, CA (US);
Xue Yang Chang, San Jose, CA (US);
Anwar Husain, Pleasanton, CA (US);
Alexander Alhajj Sulyman, Orinda, CA (US);
Timothy Joseph Franklin, Campbell, CA (US);
David J. Coumou, Rochester, NY (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method includes depositing a first layer of a first material onto a surface of a chamber component of a processing chamber. The first material comprises a polymer, the polymer having a dielectric strength of at least 40 MV/m. The method further includes depositing a second layer of a second material onto the first layer. The second material comprises a first ceramic material impregnated into the first polymer or a second polymer. The method further includes depositing a third layer. The third layer is of a third material. The third material includes the first ceramic material or a second ceramic material. The third material does not adhere to the first polymer or the second polymer. The third material does adhere to the first ceramic material or the second ceramic material of the second layer.