The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Feb. 25, 2021
Asml Netherlands B.v., Veldhoven, NL;
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Rosmalen, NL;
Johannes Bernardus Charles Engelen, 's-Hertogenbosch, NL;
Arnoud Willem Notenboom, Rosmalen, NL;
Jim Vincent Overkamp, Eindhoven, NL;
Kjeld Gertrudus Hendrikus Janssen, Nijmegen, NL;
Johannes Adrianus Cornelis Maria Pijnenburg, Moergestel, NL;
Jeroen Van Duivenbode, Veldhoven, NL;
Erik Johannes Nieuwenhuis, Eindhoven, NL;
Koos Van Berkel, Waalre, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
An object holder configured to support an object, the object holder including: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; and an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers, wherein the electrostatic sheet is bonded to the core body by a bonding material having a thickness of at least 100 nm.