The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Oct. 11, 2023
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Stmicroelectronics Pte Ltd, Singapore, SG;
Malek Brahem, Singapore, SG;
Hatem Majeri, Aix en Provence, FR;
Olivier Le Neel, Saint Martin d Uriage, FR;
Ravi Shankar, Singapore, SG;
Enrico Rosario Alessi, Catania, IT;
Pasquale Biancolillo, Pedara, IT;
STMICROELECTRONICS S.r.l., Agrate Brianza, IT;
STMICROELECTRONICS PTE LTD, Singapore, SG;
Abstract
The present disclosure is directed to a gas sensor device that detects gases with large molecules (e.g., a gas with a molecular weight between 150 g/mol and 450 g/mol), such as siloxanes. The gas sensor device includes a thin film gas sensor and a bulk film gas sensor. The thin film gas sensor and the bulk film gas sensor each include a semiconductor metal oxide (SMO) film, a heater, and a temperature sensor. The SMO film of the thin film gas sensor is an thin film (e.g., between 90 nanometers and 110 nanometers thick), and the SMO film of the bulk film gas sensor is an thick film (e.g., between 5 micrometers and 20 micrometers thick). The gas sensor device detects gases with large molecules based on a variation between resistances of the SMO thin film and the SMO thick film.