The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Jul. 12, 2024
Unity Semiconductor, Montbonnot-Saint-Martin, FR;
Hadrien Vergnet, Saint-Martin d'Hères, FR;
UNITY SEMICONDUCTOR, Montbonnot-Saint-Martin, FR;
Abstract
A device for detecting monocrystalline substrate defects, wherein a normal to the surface of the substrate is tilted by a tilt angle being contained in an angle plane, perpendicular to the surface, the device includes a detector, an illumination light source having a light beam, and arranged in a first position and/or a second position, an excitation light source illuminating the substrate and producing an emission of photoluminescence light by the substrate, imaging means imaging the substrate according to a detector field of view producing at least one image of the substrate, and processing means detecting crystalline defects using the substrate image, each illumination light source and the imaging means are arranged in a dark-field configuration, and in the first position, the illuminating light beam is parallel or quasi-parallel to the angle plane, and in the second position, the illuminating light beam is parallel or quasi-parallel to a perpendicular plane.