The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 2025

Filed:

Oct. 06, 2021
Applicant:

Entegris, Inc., Billerica, MA (US);

Inventor:

Oleg Byl, Southbury, CT (US);

Assignee:

ENTEGRIS, INC., Billerica, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F17C 11/00 (2006.01); B01J 20/22 (2006.01); B01J 20/28 (2006.01);
U.S. Cl.
CPC ...
F17C 11/00 (2013.01); B01J 20/226 (2013.01); B01J 20/28019 (2013.01); B01J 2220/66 (2013.01); F17C 2201/0119 (2013.01); F17C 2205/0323 (2013.01); F17C 2221/01 (2013.01); F17C 2223/031 (2013.01); F17C 2270/0518 (2013.01);
Abstract

Described are storage and dispensing systems and related methods, for the selective dispensing germane (GeH) as a reagent gas from a vessel in which the germane is held in sorptive relationship to a solid adsorbent medium that includes a zeolitic imidazolate framework.


Find Patent Forward Citations

Loading…