The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 07, 2025

Filed:

Aug. 18, 2021
Applicant:

Disco Corporation, Tokyo, JP;

Inventor:

Kentaro Odanaka, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); B23K 26/00 (2014.01); B23K 26/02 (2014.01); B23K 26/08 (2014.01); G05D 3/20 (2006.01); H01L 21/78 (2006.01); B23K 101/40 (2006.01); G01K 13/00 (2021.01);
U.S. Cl.
CPC ...
H01L 22/26 (2013.01); B23K 26/0006 (2013.01); B23K 26/02 (2013.01); B23K 26/0853 (2013.01); G05D 3/20 (2013.01); H01L 21/78 (2013.01); B23K 2101/40 (2018.08); G01K 13/00 (2013.01);
Abstract

A laser processing apparatus includes a laser beam applying mechanism for applying a laser beam to a workpiece held by a holding mechanism while keeping a converged spot of the laser beam in the workpiece, and a temperature detector for detecting a temperature of the holding mechanism or a temperature of an actuator of a moving mechanism that moves the holding mechanism in a processing feed direction. The laser beam applying mechanism has a converged spot position adjusting unit. The controller, depending on a temperature change detected by the temperature detector, controls the converged spot position adjusting unit to establish a position of the converged spot of the laser beam in a thicknesswise direction of the workpiece.


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