The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2025
Filed:
Jun. 15, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Upendra V. Ummethala, Cupertino, CA (US);
Blake Erickson, Gilroy, CA (US);
Prashanth Kumar, Union City, CA (US);
Michael Kutney, Santa Clara, CA (US);
Steven Trey Tindel, Austin, TX (US);
Zhaozhao Zhu, Milpitas, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A process recipe associated with a substrate at a manufacturing system is identified. A first set of measurements for the substrate is obtained from a substrate measurement subsystem. A second set of measurements for the substrate is obtained from one or more sensors of a chamber of the manufacturing system. A determination is made based on the obtained first set of measurements and the obtained second set of measurements of whether to modify the process recipe by at least one of modifying an operation of the process recipe or generating an instruction to prevent completion of execution of one or more operations of the process recipe.