The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2025
Filed:
Dec. 19, 2021
Applicant:
United Semiconductor (Xiamen) Co., Ltd., Fujian, CN;
Inventors:
Xin Zhi He, Fujian, CN;
Wen Yi Tan, Fujian, CN;
Assignee:
United Semiconductor (Xiamen) Co., Ltd., Fujian, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H05B 31/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); H05B 31/02 (2013.01);
Abstract
An apparatus for thermally processing a substrate includes a substrate support for holding the substrate and lamps disposed above the substrate support. The lamps are grouped into concentric lamp zones including a center zone comprised of a center lamp and peripheral lamps surrounding the center lamp. A center sleeve is coupled to the center lamp and peripheral sleeves are coupled to the peripheral lamps, respectively, for directing radiated heat to the substrate during thermal processing. The center sleeve has a higher surface roughness than that of the peripheral sleeves.