The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2025
Filed:
Mar. 20, 2019
Applicant:
Singulus Technologies Ag, Kahl am Main, DE;
Inventors:
Oliver Hohn, Gründau, DE;
Michael Reising, Mömbris, DE;
Johannes Grübler, Käbschütztal, DE;
Kurt Pietsch, Dresden, DE;
Jörg Koch, Dautphetal, DE;
Assignee:
SINGULUS TECHNOLOGIES AG, Kahl am Main, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01); B01B 1/00 (2006.01); C23C 16/52 (2006.01); G05D 23/19 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4481 (2013.01); B01B 1/005 (2013.01); C23C 16/52 (2013.01); G05D 23/19 (2013.01);
Abstract
The present invention is directed to a method and an apparatus for providing vapor for a discontinuous process.