The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2025
Filed:
May. 20, 2020
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/24 (2006.01); B08B 3/08 (2006.01); C11D 3/20 (2006.01); C11D 3/30 (2006.01); C11D 3/34 (2006.01); C11D 3/43 (2006.01); C11D 3/44 (2006.01); C11D 7/26 (2006.01); C11D 7/28 (2006.01); C11D 7/50 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C11D 7/5009 (2013.01); B08B 3/08 (2013.01); C11D 3/2068 (2013.01); C11D 3/2072 (2013.01); C11D 3/2093 (2013.01); C11D 3/30 (2013.01); C11D 7/263 (2013.01); C11D 7/264 (2013.01); C11D 7/266 (2013.01); C11D 7/28 (2013.01); C11D 7/5013 (2013.01); C11D 7/5022 (2013.01); H01L 21/02079 (2013.01); B08B 2220/01 (2013.01); C11D 2111/14 (2024.01);
Abstract
A cleaning solution for temporary adhesive for substrates contains: tetrabutylammonium fluoride; dimethyl sulfoxide; and a liquid compound having a solubility parameter of 8.0 or more and 10.0 or less and having a heteroatom. The tetrabutylammonium fluoride is preferably contained at a content of 1 mass % or more and 15 mass % or less in 100 mass % of a total of the tetrabutylammonium fluoride, the dimethyl sulfoxide, and the liquid compound. The dimethyl sulfoxide is preferably contained at a content of 5 mass % or more and 30 mass % or less in 100 mass % of a total of the tetrabutylammonium fluoride, the dimethyl sulfoxide, and the liquid compound.