The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2024
Filed:
Nov. 29, 2022
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Edwin Verschueren, Mierlo, NL;
Paul Tacx, Roermond, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/02 (2006.01); H01J 37/28 (2006.01); H02N 2/06 (2006.01);
U.S. Cl.
CPC ...
H01J 37/023 (2013.01); H01J 37/28 (2013.01); H02N 2/062 (2013.01); H01J 2237/20235 (2013.01); H01J 2237/20264 (2013.01); H01J 2237/20285 (2013.01); H01J 2237/2802 (2013.01);
Abstract
A positioning system can include a drive unit having an actuator element and a control system. The actuator element can include a piezoelectric material. The control system can be configured to select a path between a first position and a second position, identify at least one change of direction of the actuator element along the selected path, generate a hysteresis-compensated drive signal based at least in part on the change in direction, and apply the hysteresis-compensated drive signal to the actuator element to move an object along the path.