The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2024
Filed:
Sep. 30, 2020
Hitachi High-tech Corporation, Tokyo, JP;
Shota Mitsugi, Tokyo, JP;
Yohei Nakamura, Tokyo, JP;
Daisuke Bizen, Tokyo, JP;
Junichi Fuse, Tokyo, JP;
Satoshi Takada, Tokyo, JP;
Natsuki Tsuno, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
A control device controls a contact probe in synchronization with a pulse-controlled light having a predetermined wavelength, a measurement instrument measures a characteristic of a sample to be inspected or an analysis sample, and a circuit constant or a defect structure of the sample to be inspected is estimated based on a circuit model created by an electric characteristic analysis device configured to generate the circuit model based on a value measured by the measurement instrument and a detection signal of secondary electrons detected by the charged particle beam device.