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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12181362 B1

PDFFull Text
Date of Patent:
Dec. 31, 2024

Filed:

Nov. 29, 2021

Device and method for pressure force inspection

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Yung Chang Huang, Taichung, TW;

Tsun-En Kuo, Taichung, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;

Attorney:

Maschoff Brennan

Primary Examiner:

Dale E Page

Assistant Examiner:

Wilner Jean Baptiste

Int. Cl.
CPC ...
H01L 21/768 (2006.01); C25D 3/38 (2006.01); C25D 7/12 (2006.01); C25D 17/00 (2006.01); C25D 17/06 (2006.01); G01L 5/00 (2006.01); G01L 5/22 (2006.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
G01L 5/009 (2013.01); C25D 7/123 (2013.01); C25D 17/001 (2013.01); C25D 17/06 (2013.01); G01L 5/226 (2013.01); H01L 21/68 (2013.01); H01L 21/6838 (2013.01); H01L 21/76873 (2013.01);
Abstract

A method includes disposing a wafer in a cup of a clamshell of an electroplating apparatus. The wafer is clamped using the cup and a cone of the clamshell. Pressure forces applied by the cone against the wafer are detected by pressure sensors. The pressure forces include a maximum pressure and a minimum pressure. Clamping the wafer is stopped when a difference between the maximum pressure and the minimum pressure is higher than a predetermined value.

Find Patent Forward Citations

Huang, Yung. (2024). Device and method for pressure force inspection (U.S. Patent No. 12181362). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12181362

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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