The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2024
Filed:
May. 29, 2020
Ebara Corporation, Tokyo, JP;
Shuji Uozumi, Tokyo, JP;
Yasuyuki Motoshima, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
The present invention relates to a method and a system of automatically calibrating a radiation thermometer disposed in a polishing apparatus. This method includes: placing a heating device (), to which a measurement body () is attached, below the radiation thermometer (); and using a controller () of the polishing apparatus coupled to the heating device () to heat a temperature of the measurement body () to a plurality of target temperatures (Ta), to measure the temperatures of the measurement body () at each target temperature (Ta) with the radiation thermometer (), to calculate temperature deviation amounts which are differences between each of the target temperatures (Ta) and temperature output values of the radiation thermometer () corresponding to each target temperature (Ta), and to calibrate the radiation thermometer () so that all the temperature deviation amounts are within a preset reference range.