The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 31, 2024

Filed:

Aug. 24, 2021
Applicant:

Ebara Corporation, Tokyo, JP;

Inventors:

Atsushi Abe, Tokyo, JP;

Taro Takahashi, Tokyo, JP;

Hiroaki Shibue, Tokyo, JP;

Shinpei Tokunaga, Tokyo, JP;

Katsuhide Watanabe, Tokyo, JP;

Assignee:

EBARA CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 7/06 (2006.01); B24B 49/10 (2006.01); B24B 37/013 (2012.01);
U.S. Cl.
CPC ...
B24B 49/105 (2013.01); G01B 7/10 (2013.01); B24B 37/013 (2013.01);
Abstract

An eddy current sensor has an exciting coil and a detection coil. A holding circuit holds reference data indicating a characteristic of an output signal output from the detection coil at a reference state and outputs the reference data at a state other than the reference state. A pseudo signal generating circuit generates and outputs a balance coil pseudo signal corresponding to the output signal output from the detection coil at the reference state from the reference data output from the holding circuit. A bridge circuit, at the state other than the reference state, receives the output signal output from the detection coil and the balance coil pseudo signal and outputs a bridge output signal corresponding to a difference between the output signal and the balance coil pseudo signal as a bridge output signal.


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