The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2024
Filed:
Nov. 30, 2021
International Business Machines Corporation, Armonk, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A semiconductor structure including vertically stacked nFETs and pFETs containing suspended semiconductor channel material nanosheets (NS) and a method of forming such a structure. The structure is a three dimensional (3D) integration by vertically stacking nFETs and pFETs for area scaling. In an embodiment, vertically-stacked NS FET structures include a first nanosheet transistor located above a second nanosheet transistor; the first nanosheet transistor including a first NS channel material, wherein the first NS channel material includes a first crystalline orientation; the second nanosheet transistor including a second NS channel material, wherein the second NS channel material comprises a second crystalline orientation, the first crystalline orientation is different from the second crystalline orientation. In an embodiment, each of the respective formed vertically-stacked NS FET structures include respective suspended stack of nanosheet channels that are self-aligned with each other.