The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2024
Filed:
Oct. 05, 2020
Asml Holding N.v., Veldhoven, NL;
Asml Netherlands B.v., Veldhoven, NL;
Victor Antonio Perez-Falcon, Bridgeport, CT (US);
Marcus Adrianus Van De Kerkhof, Helmond, NL;
Daniel Leslie Hall, San Diego, CA (US);
Christopher John Mason, Newtown, CT (US);
Arthur Winfried Eduardus Minnaert, Veldhoven, NL;
Johannes Hubertus Josephina Moors, Roosteren, NL;
Samir A. Nayfeh, Dunn Loring, VA (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
Embodiments herein describe methods, devices, and systems for reducing an electric field at a clamp-reticle interface using an enhanced electrostatic clamp. In particular, the electrostatic clamp includes a clamp body, an electrode layer disposed on a top surface of the clamp body, and a plurality of burls that project from a bottom surface of the clamp body, wherein the electrode layer comprises a plurality of cutouts at predetermined locations that vertically correspond to locations of the plurality of burls at the bottom surface of the clamp body.