The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2024
Filed:
Mar. 26, 2021
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Chen-Wei Lu, Hsinchu, TW;
Chuan Wei Lin, Hsinchu, TW;
Chun-Hau Chen, Hsinchu, TW;
Kuan Yu Lai, Hsinchu, TW;
Fu-Hsien Li, Hsinchu, TW;
Chi-Feng Tung, Hsinchu, TW;
Hsiang Yin Shen, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Abstract
A storage environment monitoring device is capable of measuring and/or monitoring various parameters of an environment inside a storage area, such as airflow, temperature, and humidity, to increase the storage quality of semiconductor components stored in the storage area. The storage environment monitoring device is capable of measuring and/or monitoring the parameters of the environment inside the storage area without having to open an enclosure that is storing the semiconductor components in the storage area. This reduces exposure of the semiconductor components to contamination and other environmental factors. In addition, the storage environment monitoring device may perform automatic measurements inside the storage area based on usage schedules of the semiconductor components that are to be stored in the storage area, which decreases downtime of the storage area and/or the semiconductor components, and increases productivity in a semiconductor processing environment in which the semiconductor components are used.