The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 17, 2024

Filed:

Feb. 02, 2021
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Lorenzo Fratin, Buccinasco, IT;

Fabio Pellizzer, Boise, ID (US);

Paolo Fantini, Vimercate, IT;

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10B 63/00 (2023.01); H10N 70/00 (2023.01); H10N 70/20 (2023.01); G11C 13/00 (2006.01);
U.S. Cl.
CPC ...
H10B 63/845 (2023.02); H10B 63/30 (2023.02); H10N 70/066 (2023.02); H10N 70/231 (2023.02); H10N 70/882 (2023.02); G11C 13/0004 (2013.01); G11C 13/0028 (2013.01); G11C 2213/71 (2013.01); G11C 2213/79 (2013.01);
Abstract

Methods, systems, and devices for memory device with a split pillar architecture are described. A memory device may include a substrate arranged with conductive contacts in a pattern and openings through alternative layers of conductive and insulative material that may decrease the spacing between the openings while maintaining a dielectric thickness to sustain the voltage to be applied to the array. After etching material, an insulative material may be deposited in a trench. Portions of the insulative material may be removed to form openings, into which cell material is deposited. Conductive pillars may extend perpendicular to the planes of the conductive material and the substrate, and couple to conductive contacts. The conductive pillars and cell material may be divided to form a first and second storage components and first and second pillars.


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