The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2024
Filed:
Sep. 22, 2021
Disco Corporation, Tokyo, JP;
Yuji Hadano, Tokyo, JP;
Keiji Nomaru, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A laser processing method includes a scattered-light blocking film stacking step of stacking a scattered-light blocking film that blocks scattered light of a laser beam on an upper surface side of a wafer, a holding step of holding a lower surface side of the wafer by a chuck table, a laser processing step of forming a layer of water on the upper surface side of the wafer and irradiating a region to be processed in the wafer with the laser beam while moving the chuck table and a laser beam irradiation unit relatively, and a scattered-light blocking film removal step of removing the scattered-light blocking film from the wafer for which the laser processing step has ended.