The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 17, 2024

Filed:

Dec. 15, 2020
Applicant:

Disco Corporation, Tokyo, JP;

Inventor:

Yuta Yoshida, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B23K 26/06 (2014.01); B23K 26/073 (2006.01); B23K 26/08 (2014.01); B23K 26/364 (2014.01); G02B 19/00 (2006.01); G02B 27/09 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67092 (2013.01); B23K 26/0648 (2013.01); B23K 26/073 (2013.01); B23K 26/0853 (2013.01); B23K 26/364 (2015.10); G02B 19/0009 (2013.01); G02B 19/0047 (2013.01); G02B 27/0927 (2013.01); G02B 27/0966 (2013.01); H01L 21/67115 (2013.01); H01L 21/68764 (2013.01); B23K 26/0665 (2013.01);
Abstract

A laser processing apparatus includes an energy distribution correcting unit that forms skirt parts of a Gaussian distribution of an energy distribution in a Y-axis direction regarding a laser beam emitted from a laser oscillator into a perpendicular distribution, an imaging lens group composed of two or more lenses that form an image of the beam shape of the laser beam for which the energy distribution has been corrected by the energy distribution correcting unit on the upper surface of the workpiece, and one cylindrical lens that adjusts the energy density in an X-axis direction regarding the laser beam for which the energy distribution has been corrected by the energy distribution correcting unit.


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