The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2024
Filed:
Sep. 27, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Phillip Alfred Criminale, Liberty Hill, TX (US);
Zhiqiang Guo, San Jose, CA (US);
Andrew S. C. Ho, Liberty Hill, TX (US);
Rachel Sara Stolzman, Saratoga, CA (US);
Michael Carl Hankes, Austin, TX (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01M 10/44 (2006.01); H01M 10/46 (2006.01); H02J 7/00 (2006.01);
U.S. Cl.
CPC ...
H02J 7/00034 (2020.01); H02J 7/0044 (2013.01);
Abstract
A system includes an enclosure configured to couple to an equipment front end module (EFEM) of a substrate processing system, a charging assembly, and one or more support structures within the enclosure. The one or more support structures are configured to support a validation wafer in a charging position to charge the validation wafer via the charging assembly.