The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2024

Filed:

Jul. 18, 2023
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Marcus Straw, Hillsboro, OR (US);

Dmitry Grinfeld, Hillsboro, OR (US);

Alexander Makarov, Bremen, DE;

Alan Bahm, Hillsboro, OR (US);

Aaron Torok, Milwaukie, OR (US);

Kun Liu, Portland, OR (US);

Joseph Christian, Portland, OR (US);

Josh Gilbert, Hillsboro, OR (US);

Tom Nichols, Portland, OR (US);

Jeff Kosmoski, Hillsboro, OR (US);

Assignee:

FEI Company, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/295 (2006.01); H01J 37/20 (2006.01); H01J 49/42 (2006.01);
U.S. Cl.
CPC ...
H01J 37/295 (2013.01); H01J 37/20 (2013.01); H01J 49/4215 (2013.01);
Abstract

Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.


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