The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2024
Filed:
Aug. 26, 2021
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Boaz Pnini-Mittler, Goeggingen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An actuator device aligns an optical element of a projection exposure apparatus. The actuator device includes a shaft. The first end portion of the shaft is deflectably suspended from a base point of a supporting structure by way of a joint. The second end portion of the shaft is fixed on the optical element. At least one actuator unit has a translator fixed on the shaft and a stator mechanically connected to the supporting structure to apply a deflection force to the shaft to radially deflect the shaft from a middle position. A compensation device is set up to apply to the shaft, independently of the deflection force, a compensation force which increases in accordance with the deflection of the shaft from the middle position and which counteracts a restoring force acting on the shaft in the direction of the middle position caused by the weight of the optical element
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile