The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2024
Filed:
Feb. 26, 2020
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Ryota Ifuku, Yamanashi, JP;
Takashi Matsumoto, Yamanashi, JP;
Akira Fujio, Yamanashi, JP;
Kousaku Saito, Yamanashi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); C01B 32/18 (2017.01); C01B 32/186 (2017.01); G01N 21/956 (2006.01); H01L 21/02 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); C01B 32/18 (2017.08); C01B 32/186 (2017.08); G01N 21/956 (2013.01); H01L 21/02488 (2013.01); H01L 21/02491 (2013.01); H01L 21/02502 (2013.01); H01L 21/02527 (2013.01); H01L 21/0262 (2013.01); C01P 2004/03 (2013.01); C01P 2004/04 (2013.01); G01N 2021/8822 (2013.01);
Abstract
A method of detecting an abnormal growth of graphene includes: preparing an inspection target having a graphene film formed on a substrate by CVD; receiving light from the graphene film by using a dark field optical system; and inspecting the received light, thereby detecting the abnormal growth of the graphene.