The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2024
Filed:
Jul. 01, 2021
Mellanox Technologies, Ltd., Yokneam, IL;
Bar-ilan University, Ramat Gan, IL;
Ramot AT Tel-aviv University Ltd., Tel Aviv, IL;
Simtal Nano-coatings Ltd, Shimshit, IL;
Elad Mentovich, Tel Aviv, IL;
Yaniv Rotem, Nesher, IL;
Yaakov Gridish, Yoqneam Ilit, IL;
Doron Naveh, Petah-Tikva, IL;
Chen Stern, Kiryat Ono, IL;
Yosi Ben-Naim, Eilat, IL;
Ariel Ismach, Rosh Haain, IL;
Eran Bar-Rabi, Shimshit, IL;
Tal Kaufman, Shimshit, IL;
MELLANOX TECHNOLOGIES, LTD., Yokneam, IL;
BAR-ILAN UNIVERSITY, Ramat Gan, IL;
RAMOT AT TEL-AVIV UNIVERSITY LTD., Tel Aviv, IL;
SIMTAL NANO-COATINGS LTD, Shimshit, IL;
Abstract
A substrate carrier and a mechanism for moving the substrate carrier through a chemical vapor deposition system are provided. The substrate carrier includes a cylindrical housing having an interior surface. A plurality of plurality of shelves fixed to the interior surface, each shelf configured to support at least one substrate. The substrate carrier may include a connector configured to engage the substrate carrier with the mechanism. The mechanism may include a moveable arm and a motor configured to actuate the moveable arm. The moveable arm may include an actuating member connected to the motor and configured to move the moveable arm between a retracted state and an extended state. The moveable arm may be configured to operate in a chamber having a first pressure and a first temperature and the motor may be configured to operate in an environment having a second pressure.