The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2024
Filed:
Mar. 01, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Srinivas Poshatrahalli Gopalakrishna, Bangalore, IN;
Paul B. Reuter, Austin, TX (US);
Devendra Channappa Holeyannavar, Bangalore, IN;
Douglas B. Baumgarten, Round Rock, TX (US);
Sushant S. Koshti, Sunnyvale, CA (US);
Arunkumar Ramachandraiah, Bengaluru, IN;
Narayanan Ramachandran, Bangalore, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The disclosure describes devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include a load port for receiving a substrate carrier. The load port can include a frame adapted for connecting the load port to a factory interface, the frame comprising a transport opening through which one or more substrates are capable of being transported between the substrate carrier and the factory interface. The load port can also include an actuator coupled to the frame, and a load port door coupled to the actuator and configured to seal the transport opening. The frame height can be greater than the height of the load port door, and less than 2.5 times the height of the load port door.