The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2024
Filed:
Jun. 06, 2022
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Joseph Christian, Portland, OR (US);
Jorge Filevich, Portland, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/44 (2006.01); G01J 3/02 (2006.01); G01N 21/65 (2006.01); G01N 21/94 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
G01J 3/44 (2013.01); G01J 3/0291 (2013.01); G01N 21/65 (2013.01); G01N 21/94 (2013.01); H01J 37/28 (2013.01);
Abstract
Methods and apparatus are disclosed for concurrent cleaning and cleanliness monitoring of a sample such as a substrate for electron point projection microscopy. A graphene sample is illuminated by a laser. Raman scattering from contaminants generates secondary light which is analyzed by spectrometer. Based on Raman scattering analysis, sample cleanliness is determined. Cleaning can be dynamically terminated based on achieving a target cleanliness level or based on prediction thereof. Variations and additional applications are disclosed.