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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12157952 B1

PDFFull Text
Date of Patent:
Dec. 03, 2024

Filed:

Apr. 28, 2023

Method of controlling chemical concentration in electrolyte

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Yung-Chang Huang, Taichung, TW;

You-Fu Chen, Yunlin County, TW;

Yu-Chi Tsai, Hsinchu, TW;

Chu-Ting Chang, Taichung, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;

Attorney:

Maschoff Brennan

Primary Examiner:

Hosung Chung

Int. Cl.
CPC ...
C25D 21/18 (2006.01); C25D 3/38 (2006.01); C25D 7/12 (2006.01); C25D 17/00 (2006.01); C25D 17/02 (2006.01); C25D 21/04 (2006.01); C25D 21/08 (2006.01); C25D 21/14 (2006.01); F16K 3/02 (2006.01); F16K 31/04 (2006.01); F16K 31/50 (2006.01); H01L 21/02 (2006.01); H01L 21/288 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C25D 21/18 (2013.01); C25D 3/38 (2013.01); C25D 7/12 (2013.01); C25D 17/001 (2013.01); C25D 17/02 (2013.01); C25D 21/04 (2013.01); C25D 21/08 (2013.01); C25D 21/14 (2013.01); F16K 3/0254 (2013.01); F16K 3/0281 (2013.01); F16K 31/04 (2013.01); F16K 31/508 (2013.01); H01L 21/02068 (2013.01); H01L 21/2885 (2013.01); H01L 21/6723 (2013.01); H01L 21/67253 (2013.01); H01L 22/26 (2013.01); H01L 21/67167 (2013.01);
Abstract

A method of controlling chemical concentration in electrolyte includes measuring the chemical concentration in the electrolyte in a tank, wherein an end of an exhaust pipe is connected to a top of the tank; determining, by a valve moved along a top surface of the tank, a vapor flux through the exhaust pipe based on the measured chemical concentration; rotating, by using a motor connected to a ball screw connected to the valve, the ball screw to move a gate of the valve based on the determined vapor flux; electroplating, using the electrolyte provided by the tank, wafers respectively in a plurality of electroplating cells that are connected to the tank; and recycling the electrolyte to the tank.

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