The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2024
Filed:
Nov. 22, 2021
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Yung-Ho Alex Chuang, Cupertino, CA (US);
Vladimir Dribinski, Scotts Valley, CA (US);
Assignee:
KLA Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 33/02 (2006.01); C30B 7/00 (2006.01); C30B 9/00 (2006.01); C30B 29/10 (2006.01); C30B 29/22 (2006.01); G01N 21/95 (2006.01); G01N 21/956 (2006.01); G01N 21/84 (2006.01); G01N 21/87 (2006.01);
U.S. Cl.
CPC ...
C30B 33/02 (2013.01); C30B 7/00 (2013.01); C30B 9/00 (2013.01); C30B 29/10 (2013.01); C30B 29/22 (2013.01); G01N 21/9501 (2013.01); G01N 21/956 (2013.01); G01N 2021/8477 (2013.01); G01N 21/87 (2013.01); Y10T 117/1016 (2015.01); Y10T 117/1024 (2015.01);
Abstract
The passivation of a nonlinear optical crystal for use in an inspection tool includes growing a nonlinear optical crystal in the presence of at least one of fluorine, a fluoride ion and a fluoride-containing compound, mechanically preparing the nonlinear optical crystal, performing an annealing process on the nonlinear optical crystal and exposing the nonlinear optical crystal to a hydrogen-containing or deuterium-containing passivating gas.