The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2024
Filed:
Oct. 07, 2021
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Michael Birk Binnard, Belmont, CA (US);
Yoon Jung Jeong, San Mateo, CA (US);
Alton Hugh Phillips, Oro Valley, AZ (US);
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 9/16 (2006.01); B25J 9/00 (2006.01); B25J 9/12 (2006.01); B25J 9/14 (2006.01); B25J 13/08 (2006.01);
U.S. Cl.
CPC ...
B25J 9/1664 (2013.01); B25J 9/0009 (2013.01); B25J 9/003 (2013.01); B25J 9/123 (2013.01); B25J 9/144 (2013.01); B25J 9/1623 (2013.01); B25J 13/088 (2013.01); G05B 2219/50162 (2013.01);
Abstract
A vibration reduction system includes a base, a carrier element, and a plurality of actuator systems extending between the base and the carrier element, the plurality of actuator systems arranged to apply forces to the carrier element in multiple axes to reduce vibration of the carrier element, each actuator system of the plurality of actuator systems including a pneumatic actuator and an electric actuator.