The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 26, 2024

Filed:

May. 19, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company, Hsinchu, TW;

Inventors:

Yu-Chen Chen, Hemei Township, TW;

Chih-Hung Huang, Hsinchu, TW;

Cheng-Lung Wu, Zhunan Township, TW;

Yang-Ann Chu, Hsinchu, TW;

Jiun-Rong Pai, Jhubei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23P 11/00 (2006.01); B23P 19/06 (2006.01); B25B 23/10 (2006.01); B25J 15/00 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
B23P 19/06 (2013.01); B23P 11/00 (2013.01); B25B 23/10 (2013.01); B25J 15/0019 (2013.01); H01L 21/6732 (2013.01); Y10T 29/49819 (2015.01);
Abstract

The present disclosure relates to methods for inserting a fastener into a wafer-carrying pod. The system includes a robotic arm with a screw tool assembly disposed at the far end of the robotic arm. The screw tool assembly includes a lower sleeve configured to receive a fastener. A screwdriver is disposed within an upper sleeve of the screw tool assembly, and a motor is provided to rotate the screwdriver. In use, the screw tool assembly is positioned over the fastener so the lower sleeve surrounds the fastener and the screwdriver engages the fastener. The fastener head is received within the lower sleeve, and the screwdriver screws the fastener into the pod.


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