The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2024
Filed:
Mar. 16, 2023
Applicant:
Disco Corporation, Tokyo, JP;
Inventors:
Hiroshi Morikazu, Tokyo, JP;
Nobuyuki Kimura, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/364 (2014.01); B23K 26/06 (2014.01); B23K 26/073 (2006.01); B23K 26/082 (2014.01); B23K 26/359 (2014.01); B23K 26/402 (2014.01); B23K 103/00 (2006.01); B32B 7/12 (2006.01); B32B 9/04 (2006.01); B32B 15/04 (2006.01); B32B 15/20 (2006.01); B32B 43/00 (2006.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
B23K 26/364 (2015.10); B23K 26/0665 (2013.01); B23K 26/073 (2013.01); B23K 26/082 (2015.10); B23K 26/359 (2015.10); B23K 26/402 (2013.01); H01L 33/0093 (2020.05); B23K 2103/56 (2018.08); B32B 7/12 (2013.01); B32B 9/041 (2013.01); B32B 15/043 (2013.01); B32B 15/20 (2013.01); B32B 43/006 (2013.01); B32B 2311/04 (2013.01); B32B 2311/06 (2013.01); B32B 2311/09 (2013.01); B32B 2311/12 (2013.01); B32B 2315/00 (2013.01);
Abstract
A laser beam irradiation unit of a laser processing apparatus includes a laser oscillator that oscillates a laser, a Y-axis scanner that executes a high-speed scan with a laser beam emitted from the laser oscillator in a Y-axis direction, an X-axis scanner that executes processing feed of the laser beam emitted from the laser oscillator in an X-axis direction, and a beam condenser. The Y-axis scanner is selected from any of an AOD, a resonant scanner, and a polygon scanner and the X-axis scanner is selected from a galvano scanner and a resonant scanner.