The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2024
Filed:
Feb. 07, 2022
Changxin Memory Technologies, Inc., Hefei, CN;
Jingwen Lu, Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Abstract
Provided are a memory and a method for manufacturing the same, and relates to the technical field of semiconductors. The manufacturing method of a memory comprises: providing a substrate; forming a plurality of sacrificial pillars arranged at intervals between each two adjacent ones of the bit line isolation walls; forming a supplementary layer on surfaces of the sacrificial pillars; performing ion implantation to the supplementary layer; etching the supplementary layer; forming insulating pillars between adjacent sacrificial pillars; removing the sacrificial pillars and the remaining supplementary layer; and forming a plurality of node contact plugs in the contact holes.