The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2024
Filed:
Mar. 17, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Masanori Takahashi, Miyagi, JP;
Shota Ezaki, Miyagi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); F25B 21/04 (2006.01); H01J 37/32 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); F25B 21/04 (2013.01); H01J 37/3244 (2013.01); H01J 37/32724 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01J 37/32091 (2013.01); H01J 2237/334 (2013.01); H01L 21/67069 (2013.01); H01L 21/6833 (2013.01);
Abstract
A substrate support for use in a substrate processing apparatus includes: a base having an internal space; an electronic circuit board disposed in the internal space; a substrate supporting plate disposed on the base; and at least one temperature adjusting element disposed in the internal space, the at least one temperature adjusting element being configured to adjust a temperature of the electronic circuit board.